TOPPAN PHOTOMASK AND EV GROUP JOIN FORCES TO ACCELERATE MARKET ADOPTION OF NANOIMPRESSION LITHOGRAPHY FOR PHOTONIC MANUFACTURING

TOPPAN PHOTOMASK AND EV GROUP JOIN FORCES TO ACCELERATE MARKET ADOPTION OF NANOIMPRESSION LITHOGRAPHY FOR PHOTONIC MANUFACTURING

Joint marketing and technology collaboration will leverage the strengths of two market leaders to deliver nanoimprint lithography development kits and drive industrial-scale implementation

ST. FLORIAN, Austria and TOKYO, September 20, 2022 /PRNewswire/ — Toppan Photomask Co. Ltd., the world’s leading supplier of photomasks, and EV Group (EVG), a leading supplier of wafer bonding and lithography equipment for the MEMS, nanotechnology and semiconductor markets , announced today that they have entered into an agreement to jointly commercialize nanoimprint lithography (NIL) as a high-volume manufacturing (HVM) process for the photonics industry.

EV group and Toppan photo mask

The collaboration, which combines the strengths of the leading supplier and pioneer of NIL systems and the leading supplier of photomasks in the semiconductor market, aims to establish NIL as an industry standard production process for photonics manufacturing and to accelerate its implementation in HVM to support a wide variety of applications. These applications include augmented/mixed/virtual reality headsets, smartphones and automotive sensors, and medical imaging systems.

Toppan Photomask manufactures photomasks for the semiconductor industry like the one shown here.  Nanoimprint Lithography (NIL) masters are made using the same materials, technologies and techniques.  Source: Toppan Photomask.

Toppan Photomask manufactures photomasks for the semiconductor industry like the one shown here. Nanoimprint Lithography (NIL) masters are made using the same materials, technologies and techniques. Source: Toppan Photomask.

Process engineers at EV Group's NILPhotonics® Competence Center examine a 200mm wafer with replicated metal lenses using a master made by Toppan Photomask and Nanoimprint Lithography (NIL) process d 'EVG.  Source: EV Group.

Process engineers at EV Group’s NILPhotonics® Competence Center examine a 200mm wafer with replicated metal lenses using a master made by Toppan Photomask and Nanoimprint Lithography (NIL) process d ‘EVG. Source: EV Group.

In this non-exclusive collaboration, EVG and Toppan Photomask will pool their knowledge, expertise and services to provide NIL development kits using Toppan Photomask master models and provided equipment and process development services. by EVG to further promote the NIL technology and its possibilities for implementation on an industrial scale. In addition, EVG will offer NIL technology and product demonstrations to interested companies at EVG’s NILPhotonics show.® Competence Center at its headquarters in Austria. Additionally, each company will designate the other as a recommended supply chain partner for companies wishing to leverage NIL to meet their production needs.

“Toppan Photomask is very pleased to enter into collaboration with EVG,” said Chan Uk JeonChief Technology Officer of Toppan Photomask Co., Ltd. “EVG’s NIL tooling and processing capabilities are world-class and will enable profitable growth in photonics and other new technologies that now accommodate NIL technology. Toppan Photomask sees a bright future as NIL turns into another successful lithography solution, made possible by the established strengths of both companies.”

Bringing Nanoimprint Lithography to Consumer Manufacturing

Traditional lithography technologies are reaching their limits when it comes to addressing future applications that require the creation of small, arbitrarily shaped patterns, such as metal lenses. NIL is a proven and cost-effective process for generating nanoscale resolution models on complex structures, and therefore is a viable alternative for these applications. NIL can reproduce these complex structures very efficiently, on large surfaces, with fewer design constraints and a very streamlined process flow, both for prototyping and HVM.

EVG has been a pioneer of NIL technology for over 20 years and has helped foster a broader NIL ecosystem through partnerships across the NIL supply chain – from suppliers of optical materials (such as adhesives and resins) , substrate materials and pad production to optical component and device manufacturers. Through this collaboration between two established industry leaders in lithography and photomask manufacturing, respectively, EVG and Toppan Photomask intend to drive the adoption of NIL as a mainstream HVM technology for the photonics industry.

“We are thrilled to partner with Toppan Photomask to bring nanoimprint lithography to mainstream manufacturing applications,” said Markus Wimplinger, Director of Enterprise Technology Development and Intellectual Property at EV Group. As a leading supplier of solid state photomasks, renowned for the highest quality standards, Toppan Photomask has extensive experience working with standardized production methods involving the strictest manufacturing requirements in the world. This first-of-its-kind collaboration between a supplier of nanoimprint process equipment and services and a leading nanoimprint manufacturer is a huge win for the industry and will help our customers rapidly develop NIL as a mass production technology. for advanced optical devices and components – helping them realize new “virtual” ideas.

Upcoming Nanoimprint Industry Events

Experts from both companies will be available to discuss this collaboration at the Eurosensors 2022 Micro and Nano Engineering (MNE) conference, taking place at the Gasthuisberg University Campus in Leuven, Belgiumof September 19-23. Event attendees can visit EVG at booth #S8 to learn more.

In addition, Christine Thanner of EVG gives an invited plenary talk at the Nanoimprint and Nanoprint Technology (NNT) conference in Toyama, Japan on October 5entitled “Nanoimprint – from niche to high-volume manufacturing”, where she will discuss the importance of having the right combination of NIL mastering techniques, equipment and replication processes.

NILPhotonics Competence Center: a flexible mode of cooperation

EVG’s NILPhotonics Competence Center provides an open-access innovation incubator enabling customers and partners across NIL’s supply chain to collaborate to shorten development cycles and time-to-market of devices and devices. innovative photonics applications. The center is highly flexible and adapts to varying customer needs while ensuring the highest level of IP protection for every aspect of development. The clean room is designed to meet the most stringent customer requirements and allows for virtual line concepts where wafers are reintroduced to customer factories for further processing. More information is available at https://www.evgroup.com/products/process-services/nilphotonics-competence-center/.

About Toppan Photo Mask
Toppan Photomask Co., Ltd. (TPC) is the world’s leading supplier of semiconductor photomasks. Based at TokyoTPC was launched in April 2022 as a carve-out of Toppan Inc., a diversified global leader in communications, security, packaging, decorative materials and electronics solutions. With a group of companies that includes Toppan Photomasks Inc., headquartered in the United States, and Toppan Chunghwa Electronics Co., Ltd. Taiwan, TPC leverages its global customer service network and seven manufacturing sites located in key geographies to deliver the most advanced technology in the world. TPC is also expanding into the field of processed silicone products, such as stencil masks and nanoimprint molds, to contribute to the development of cutting-edge products for smartphones, AI and 5G. For more information, visit https://www.photomask.co.jp/english/.

About EV Group (EVG)

EV Group (EVG) is a leading supplier of equipment and process solutions for manufacturing semiconductors, microelectromechanical systems (MEMS), compound semiconductors, power devices and nanotechnology devices. Principal products include wafer bonding, thin wafer processing, lithography/nanoimprint lithography (NIL) and metrology equipment, as well as photoresist coaters, cleaners and inspection systems. Founded in 1980, EV Group maintains and supports an elaborate network of global customers and partners around the world. More information about EVG is available at www.EVGroup.com

(PRNewsfoto/Toppan Photomask,Toppan)

(PRNewsfoto/Toppan Photomask,Toppan)

SOURCE Toppan Photomask

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